Successful test of the DaOS prototype

After a total of three years of research and development, the prototype of the In-Situ Deflectometric acquisition of Optical Surfaces measurement technology DaOS could now be tested and evaluated on a flat test object.

After the respective polishing steps, in-situ measurements were carried out in the machine using the newly developed traverse with vignetting field diaphragm sensor ELWIMAT from Hofbauer.

For referencing, all measurements were also carried out on an SSI-A interferometer in the measuring room of the TC-Teisnach.

Result:

Accuracy < 60 nm PV and < 20 nm rms. Especially long-wave deviations are evaluated very reliably and corrected during the next polishing step.

Systematic influences due to different test specimen supports as well as temperature gradients in the production environment can be set by known process parameters.